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Proceedings Paper

Design and fabrication of acousto-optic waveguide phase modulator in electro-optic integrated accelerometer
Author(s): Yanjun Zhang; Jianxia Wei; Haibao Wang; Caihe Chen
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Paper Abstract

A novel electro-optic integrated acceleration seismic geophone is presented in this paper. In order to modulate the phase of optical waveguide M-Z interferometer on silicon substrate, the method of acousto-optic phase modulation is proposed. The acousto-optic phase modulator realizes phase modulation by passing the reference beam through a surface acoustic wave (SAW) generated on a ZnO thin-film transducer driven by an interdigital transducer (IDT). The motivation and the transmission of the SAW is researched and the principle of IDT is discussed. The refractive index change, generated by the SAW is analyzed. On the basis of above analysis of acousto-optic phase modulation, considering the design demands of the electro-optic integrated acceleration seismic geophone, optimum dimension parameters of the acousto-optic modulation device, e.g., the number N of finger pairs, characteristic length L and interdigital period M is implemented. So optimization structure design of the ZnO thin film and the structure of IDT are designed. Lots of theoretical and experimental researches on preparation handicraft of ZnO thin film and IDT have been done and the acousto-optic phase modulator is fabricated.

Paper Details

Date Published: 21 November 2007
PDF: 8 pages
Proc. SPIE 6781, Passive Components and Fiber-based Devices IV, 678136 (21 November 2007); doi: 10.1117/12.745214
Show Author Affiliations
Yanjun Zhang, Yanshan Univ. (China)
Jianxia Wei, Tianjin Navigation Instruments Research Institute (China)
Haibao Wang, Yanshan Univ (China)
Caihe Chen, Tianjin Univ. (China)

Published in SPIE Proceedings Vol. 6781:
Passive Components and Fiber-based Devices IV
Ming-Jun Li; Jianping Chen; Satoki Kawanishi; Ian H. White, Editor(s)

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