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Proceedings Paper

Nanofabrication of TiO2 nanowires: I-V characteristic and improvement of metal oxides gas sensing properties
Author(s): L. Francioso; A. Forleo; A. M. Taurino; P. Siciliano
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Paper Abstract

A cheap nanofabrication process for Titania (TiO2) polycristalline nanowire array for gas sensing applications with lateral size ranging from 90 to 180 nm, and gas sensing characterizations are presented. Alternatively to typical pattern transfer techniques for submicron fabrication, authors focused on a standard 365 nm UV photolithographic process able to fabricate sol-gel nanostructured titania nanowires from a solid thin film. Main aim of present work is the experimental validation of enhanced gas sensing response of nanopatterned metal oxide thin film sensors. Two different kind of gas sensor with nanopatterned sensitive area have been realized onto silicon substrates and tested towards different EtOH concentrations; experimental tests have been carried out with a contemporary output signals collection from a nanowires-based gas sensor and a second device with solid sensitive film without patterning, in order to validate effects of nano-machining on sensitive material response.

Paper Details

Date Published: 15 May 2007
PDF: 8 pages
Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 658913 (15 May 2007); doi: 10.1117/12.722069
Show Author Affiliations
L. Francioso, CNR-Institute for Microelectronics and Microsystems (Italy)
A. Forleo, CNR-Institute for Microelectronics and Microsystems (Italy)
A. M. Taurino, CNR-Institute for Microelectronics and Microsystems (Italy)
P. Siciliano, CNR-Institute for Microelectronics and Microsystems (Italy)

Published in SPIE Proceedings Vol. 6589:
Smart Sensors, Actuators, and MEMS III
Thomas Becker; Carles Cané; N. Scott Barker, Editor(s)

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