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Proceedings Paper

Resonance frequencies and modal shape characterization of piezoelectric microcantilevers
Author(s): P. Sanz-González; J. Hernando; J. Vazquez; J. L. Sanchez-Rojas
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Paper Abstract

This paper reports a deep study of the frequency response of ZnO-based piezoelectric cantilevers. Laser vibrometry and impedance measurements have been carried out on such devices, obtaining a good agreement in the characteristic frequencies. However, certain resonances that are clearly identified thanks to the high sensitivity of the laser vibrometer do not show the corresponding impedance change. A computational model has been successfully developed to allow us to explain this behaviour based on the piezoelectric charge generated by the different modes. Finally, we discuss the essential role played by the modal shapes in the electrical detection of the resonances.

Paper Details

Date Published: 15 May 2007
PDF: 10 pages
Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 65890L (15 May 2007); doi: 10.1117/12.721832
Show Author Affiliations
P. Sanz-González, ETSI Industriales (Spain)
J. Hernando, ETSI Industriales (Spain)
J. Vazquez, ETSI Industriales (Spain)
J. L. Sanchez-Rojas, ETSI Industriales (Spain)

Published in SPIE Proceedings Vol. 6589:
Smart Sensors, Actuators, and MEMS III
Thomas Becker; Carles Cané; N. Scott Barker, Editor(s)

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