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Proceedings Paper

Silicon nanophotonics using deep-UV lithography
Author(s): P. Bienstman; F. Van Laere; D. Taillaert; P. Dumon; W. Bogaerts; K. De Vos; D. Van Thourhout; R. Baets
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Paper Abstract

We will present recent progress in several devices based on silicon-on-insulator nanophotonics using deep-UV lithography. We will report on high efficiency grating couplers, ultra-compact arrayed waveguide gratings and ring-resonator based biosensors.

Paper Details

Date Published: 4 October 2006
PDF: 12 pages
Proc. SPIE 6351, Passive Components and Fiber-based Devices III, 63512M (4 October 2006); doi: 10.1117/12.690594
Show Author Affiliations
P. Bienstman, Ghent Univ. (Belgium)
F. Van Laere, Ghent Univ. (Belgium)
D. Taillaert, Ghent Univ. (Belgium)
P. Dumon, Ghent Univ. (Belgium)
W. Bogaerts, Ghent Univ. (Belgium)
K. De Vos, Ghent Univ. (Belgium)
D. Van Thourhout, Ghent Univ. (Belgium)
R. Baets, Ghent Univ. (Belgium)

Published in SPIE Proceedings Vol. 6351:
Passive Components and Fiber-based Devices III
Sang Bae Lee; Yan Sun; Kun Qiu; Simon C. Fleming; Ian H. White, Editor(s)

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