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Proceedings Paper

Realization of two-dimensional air-bridge silicon photonic crystals by focused ion beam, milling, and nanopolishing
Author(s): Wico C. L. Hopman; René M. de Ridder; Shankar Selvaraja; Cazimir G. Bostan; Vishwas J. Gadgil; Laurens Kuipers; Alfred Driessen
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Paper Abstract

We report the design and fabrication of small photonic crystal structures which are combined with conventional dielectric ridge waveguides. We describe in details the fabrication of both rough and smooth membranes, which are used as host for photonic crystals. Two Focused Ion Beam milling experiments are highlighted: the first one shows how photonic crystals can be fast and accurate milled into a Si membrane, whereas the second experiment demonstrates how focused ion beam milling can turn a rough surface into a well-patterned nano-smooth surface. The previously ultra rough surface showed no detectable roughness after milling due to the nanopolishing effect of the focused ion beam milling.

Paper Details

Date Published: 18 April 2006
PDF: 7 pages
Proc. SPIE 6182, Photonic Crystal Materials and Devices III (i.e. V), 61820V (18 April 2006);
Show Author Affiliations
Wico C. L. Hopman, Univ. of Twente (Netherlands)
René M. de Ridder, Univ. of Twente (Netherlands)
Shankar Selvaraja, Univ. of Twente (Netherlands)
Cazimir G. Bostan, Univ. of Twente (Netherlands)
Vishwas J. Gadgil, Univ. of Twente (Netherlands)
Laurens Kuipers, Univ. of Twente (Netherlands)
FOM Institute for Atomic and Molecular Physics (Netherlands)
Alfred Driessen, Univ. of Twente (Netherlands)

Published in SPIE Proceedings Vol. 6182:
Photonic Crystal Materials and Devices III (i.e. V)
Richard M. De La Rue; Pierre Viktorovitch; Ceferino Lopez; Michele Midrio, Editor(s)

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