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Proceedings Paper

Optimal segmentation of polygon edges
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Paper Abstract

In optical proximity correction, edges of polygons are segmented, and segments are independently moved to meet line-width or edge placement goals. The purpose of segmenting edges is to increase the degrees of freedom in proximity correction. Segmentation is usually performed according to predetermined, geometrical rules. Heuristic, model-based segmentation algorithms have been presented in the literature. We show that there is an optimal and unique way of segmenting polygon edges.

Paper Details

Date Published: 14 March 2006
PDF: 8 pages
Proc. SPIE 6156, Design and Process Integration for Microelectronic Manufacturing IV, 61561G (14 March 2006); doi: 10.1117/12.656695
Show Author Affiliations
Apo Sezginer, Invarium, Inc. (United States)
Bayram Yenikaya, Invarium, Inc. (United States)
Hsu-Ting Huang, Invarium, Inc. (United States)
Vishnu Kamat, Invarium, Inc. (United States)
Yung-Tin Chen, SanDisk, Inc. (United States)

Published in SPIE Proceedings Vol. 6156:
Design and Process Integration for Microelectronic Manufacturing IV
Alfred K. K. Wong; Vivek K. Singh, Editor(s)

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