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Proceedings Paper

CCD small signal characterization using fluoresce x rays
Author(s): Kasey Boggs
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Paper Abstract

Past and present revelations within scientific imaging have stressed the importance of CCD small signal sensitivity. Current characterization techniques use a Fe55 soft x-ray source to determine charge transfer and noise, however rendering signal sensitivity less than 1620 e- unknown. CCD evolution has brought forth innovative design and fabrication techniques to decrease device noise and increase device sensitivity, enabling low level imaging. This paper presents a simple approach to characterizing the transfer functions, linearity, noise, and output sensitivity at low signal levels, thus confirming the true capabilities of the imager. This characterization technique also validates the quality of the base material and process via low level trap testing. The characterization method uses fluoresce x-rays from target materials to illuminate the imager.

Paper Details

Date Published: 6 February 2006
PDF: 7 pages
Proc. SPIE 6068, Sensors, Cameras, and Systems for Scientific/Industrial Applications VII, 60680T (6 February 2006); doi: 10.1117/12.644326
Show Author Affiliations
Kasey Boggs, Semiconductor Technology Associates, Inc. (United States)

Published in SPIE Proceedings Vol. 6068:
Sensors, Cameras, and Systems for Scientific/Industrial Applications VII
Morley M. Blouke, Editor(s)

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