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Proceedings Paper

An image sensor with on-die diffractive optics in 0.18μm bulk CMOS
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Paper Abstract

On-die optics are an attractive way of reducing package size for imaging and non-imaging optical sensors. While systems incorporating on-die optics have been built for imaging and spectral analysis applications, these have required specialized fabrication processes and additional off-die components. This paper discusses the fabrication of an image sensor with neither of these limitations. Through careful design, an image sensor is implemented that uses on-die diffractive optics fabricated using a standard 0.18 micron bulk CMOS process, with simulations indicating that the resulting die is capable of acting as a standalone imaging system resolving spatial features to within ±0.15 radian and spectral features to within ±40 nm wavelength accuracy.

Paper Details

Date Published: 6 February 2006
PDF: 12 pages
Proc. SPIE 6068, Sensors, Cameras, and Systems for Scientific/Industrial Applications VII, 606806 (6 February 2006); doi: 10.1117/12.642450
Show Author Affiliations
Christopher Thomas, York Univ. (Canada)
Richard Hornsey, York Univ. (Canada)

Published in SPIE Proceedings Vol. 6068:
Sensors, Cameras, and Systems for Scientific/Industrial Applications VII
Morley M. Blouke, Editor(s)

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