Share Email Print

Proceedings Paper

Microchannel fabrication in PMMA based on localized heating using high-repetition rate femtosecond pulses
Author(s): Daniel Day; Min Gu
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Femtosecond laser pulses with energy of 0.9 nJ per pulse and a 80 MHz repetition rate at a wavelength of 750 nm were used to fabricate straight microchannels in a PMMA substrate. The size and shape of the microchannels can be controlled by changing the fabrication parameters of speed, the number of fabrication repeats and delay in-between fabrication repeats. It has been proposed that the absorption of energy in the focal region modifies the density of the polymer matrix, which after annealing the sample above the glass transition temperature results in the formation of the microchannels. Diffusion of heat through the substrate is a uniform process which has the effect of creating symmetrically shaped channels. This fabrication method is expected to have applications in the fabrication of microstructures or microfluidic devices in polymer substrates.

Paper Details

Date Published: 28 December 2005
PDF: 8 pages
Proc. SPIE 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV, 603704 (28 December 2005);
Show Author Affiliations
Daniel Day, Swinburne Univ. of Technology (Australia)
Min Gu, Swinburne Univ. of Technology (Australia)

Published in SPIE Proceedings Vol. 6037:
Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
Jung-Chih Chiao; Andrew S. Dzurak; Chennupati Jagadish; David V. Thiel, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?