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Proceedings Paper

Innovative production of thin film laser components
Author(s): Michael Scherer; Harro Hagedorn; Walter Lehnert; Juergen Pistner
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Paper Abstract

Future production of high quality laser components asks for both, the precise preparation of low loss multilayer stacks and a clean room compatible innovative deposition process. In addition a cost-effective thin film filter production is required in order to transfer new developments like ultra fast pulse laser technique from research to economical products and applications. One of the most promising candidates is magnetron sputtering due to the potential of excellent film properties, a fully automatic clean room compatible manufacturing process and a high productivity. Similar film qualities as with ion beam sputtering are realised but with a more than 10 times higher productivity. The reproducible production of multilayer broad band mirrors with controlled group delay dispersion and low losses is still a big challenge. Promising results were achieved on the basis of silica and niobia and will be presented.

Paper Details

Date Published: 4 October 2005
PDF: 10 pages
Proc. SPIE 5963, Advances in Optical Thin Films II, 596319 (4 October 2005);
Show Author Affiliations
Michael Scherer, Leybold Optics GmbH (Germany)
Harro Hagedorn, Leybold Optics GmbH (Germany)
Walter Lehnert, Leybold Optics GmbH (Germany)
Juergen Pistner, Leybold Optics GmbH (Germany)

Published in SPIE Proceedings Vol. 5963:
Advances in Optical Thin Films II
Claude Amra; Norbert Kaiser; H. Angus Macleod, Editor(s)

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