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Proceedings Paper

Correlation between the optical performance of TiO2-Ag-TiO2 multilayers and the interface roughness between the layers
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Paper Abstract

Ag-dielectric multilayers are widely used in the production of heat reflecting filters, induced transmission filters, beam splitters, etc. The performance of such coatings in the visible part of the spectrum is sometimes strongly influenced by a plasmon absorption in the Ag-layer or a surface plasmon absorption in the Ag-dielectric interfaces. The strength of the plasmon absorption is very sensitive to the layer structure, the light polarization and the angle of incidence. As a result, the target specifications for reflection and transmission are not reached easily. We investigate PVD-deposited TiO2-Ag-TiO2 multilayers by means of optical reflection and transmission and Grazing Incidence X-ray Reflectometry (GIXR). The GIXR-method yields the individual layers thicknesses and the interface roughness. Some of the coatings have a broad absorption peak between 500 and 400nm that cannot be modeled using the bulk dielectric function of Ag. The magnitude of the absorption peak is correlated with the measured roughness of the TiO2-Ag interfaces. The analysis of the results shows the critical parameters for the deposition process.

Paper Details

Date Published: 4 October 2005
PDF: 8 pages
Proc. SPIE 5963, Advances in Optical Thin Films II, 596317 (4 October 2005); doi: 10.1117/12.625193
Show Author Affiliations
Bernhard von Blanckenhagen, Carl Zeiss AG (Germany)
Diana Tonova, Carl Zeiss AG (Germany)

Published in SPIE Proceedings Vol. 5963:
Advances in Optical Thin Films II
Claude Amra; Norbert Kaiser; H. Angus Macleod, Editor(s)

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