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Proceedings Paper

Chemical vapour deposition of optical coatings onto small scale complex optical components
Author(s): M. L. Hitchman; D. R. Gibson; W. Manookian; E. M. Waddell
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Paper Abstract

In this paper we describe how optical coatings can be deposited uniformly with a high precision and reproducibility on 3-dimensional substrates, such as spherical lenses, by CVD. We present results that will highlight some specific advantages of CVD over the traditionally used methods of e-beam evaporation and magnetron sputtering and we will show that CVD has tremendous potential for enhancing the quality of optical coatings and for making cost savings.

Paper Details

Date Published: 5 October 2005
PDF: 7 pages
Proc. SPIE 5963, Advances in Optical Thin Films II, 59631G (5 October 2005); doi: 10.1117/12.625178
Show Author Affiliations
M. L. Hitchman, Thin Film Innovations Ltd. (United Kingdom)
D. R. Gibson, Thin Film Innovations Ltd. (United Kingdom)
W. Manookian, Thin Film Innovations Ltd. (United Kingdom)
E. M. Waddell, Thin Film Innovations Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 5963:
Advances in Optical Thin Films II
Claude Amra; Norbert Kaiser; H. Angus Macleod, Editor(s)

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