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Proceedings Paper

B4C/Mo/Si multilayers for 20–40 nm wavelengths: application to broadband mirrors
Author(s): Franck Delmotte; Julien Gautier; Marc Roulliay; Marie Francoise Ravet; Francoise Bridou; Arnaud Jerome
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Paper Abstract

Theoretically, periodic three component multilayers as B4C/Mo/Si allow an improvement of the reflectivity in the 25 nm-40 nm range as compared to two component multilayers as B4C/Si. Optimized B4C/Mo/Si and B4C/Si multilayers have been deposited by magnetron sputtering and ion beam sputtering. The multilayers have been characterized by x-ray grazing reflectometry (λ = 0.154 nm) and synchrotron radiation measurements at near normal incidence. The maximum experimental reflectivity for B4C/Si is 25% at 32 nm and 23% at 38 nm. For B4C/Mo/Si multilayers, we obtained an experimental reflectivity of 34% at 32 nm and 29% at 39.5 nm. Moreover the width of the Bragg peak is larger for B4C/Mo/Si than for B4C/Si. We have used these multilayers in a non periodical structure in order to produce broadband mirrors. It consists of the superposition of two periodic B4C/Mo/Si multilayers with different period thickness. Theoretical optimization of such structure by simulation is presented. Preliminary experimental results demonstrate the interest of such structure : two broadband mirrors have been deposited and measured over a wide wavelength range (12 nm to 45 nm). The first mirror presents a broadband spectrum centered at 32 nm with peak reflectivity of 22% and bandwidth larger than 9 nm. The second mirror has been optimized to produce theoretically an average reflectivity of 19% from 25 nm to 35 nm.

Paper Details

Date Published: 5 October 2005
PDF: 8 pages
Proc. SPIE 5963, Advances in Optical Thin Films II, 59631V (5 October 2005);
Show Author Affiliations
Franck Delmotte, Lab. Charles Fabry de l'Institut d'Optique, CNRS (France)
Julien Gautier, Lab. Charles Fabry de l'Institut d'Optique, CNRS (France)
Marc Roulliay, Lab. Charles Fabry de l'Institut d'Optique, CNRS (France)
Marie Francoise Ravet, Lab. Charles Fabry de l'Institut d'Optique, CNRS (France)
Francoise Bridou, Lab. Charles Fabry de l'Institut d'Optique, CNRS (France)
Arnaud Jerome, Lab. Charles Fabry de l'Institut d'Optique, CNRS (France)

Published in SPIE Proceedings Vol. 5963:
Advances in Optical Thin Films II
Claude Amra; Norbert Kaiser; H. Angus Macleod, Editor(s)

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