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Proceedings Paper

Zr–silicate co-evaporated thin films
Author(s): J. Ciosek; W. Paszkowicz; A. Kudla; P. Pankowski; U. Stanislawek
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Paper Abstract

Thin films of Zr-silicate were deposited on silicon and BK7 glass substrates by EB co-evaporation. The mixing thermodynamics of the ZrO2 - SiO2 system was analysed. Chemical bonding in Zr-silicates has been studied by X-ray photoelectron spectroscopy. The structural and optical properties and the surface morphology were investigated.

Paper Details

Date Published: 5 October 2005
PDF: 6 pages
Proc. SPIE 5963, Advances in Optical Thin Films II, 59631M (5 October 2005);
Show Author Affiliations
J. Ciosek, Institute of Electron Technology (Poland)
W. Paszkowicz, Institute of Physics, PAS (Poland)
A. Kudla, Institute of Electron Technology (Poland)
P. Pankowski, Institute of Physics, PAS (Poland)
U. Stanislawek, Institute of Optoelectronics, MUT (Poland)

Published in SPIE Proceedings Vol. 5963:
Advances in Optical Thin Films II
Claude Amra; Norbert Kaiser; H. Angus Macleod, Editor(s)

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