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Proceedings Paper

Dynamic measurements of actuators driven by AlN layers
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Paper Abstract

Micro-Electro-Mechanical Systems are nowadays frequently used in many fields of industry. The number of their applications increase and their functions became more complex and demanding. Therefore precise knowledge about their static (shape, deformations, stresses) and dynamic (resonance frequencies, amplitude and phase of vibration) properties is necessary. Two beam laser interferometry is one of the most popular testing methods of micromechanical elements as a non-contact, high-accurate method allowing full-field measurement. First part of the paper present microbeam actuators designed for MEMS/MOEMS applications. The proposed structures are the straight silicon microbeams formed by KOH etching of Si wafer. Aluminium nitride (AlN) thin films are promising materials for many acoustic and optic applications in MEMS field. In the proposed architecture the actuation layer is sandwiched between two metal electrodes on the top of beam. In the second part we describe the methodology of the actuator characterization. These methods applied are: stroboscopic interferometry and active interferometry (LCOS SLM is used as a reference surface in Twyman-Green interferometer). Moreover some results of FEM analysis of the sample are shown and compared with experimental results. Dynamic measurements validate the design and simulations, and provide information for optimization of the actuator manufacturing process.

Paper Details

Date Published: 11 October 2005
PDF: 8 pages
Proc. SPIE 5958, Lasers and Applications, 59580J (11 October 2005); doi: 10.1117/12.622853
Show Author Affiliations
Jacek Kacperski, Warsaw Univ. of Technology (Poland)
Malgorzata Kujawinska, Warsaw Univ. of Technology (Poland)
Sergio Camacho Leon, Tecnológico de Monterrey (Mexico)
Lukasz Nieradko, Univ. de Franche-Comté (France)
Michal Jozwik, Univ. de Franche-Comté (France)
Christophe Gorecki, Univ. de Franche-Comté (France)

Published in SPIE Proceedings Vol. 5958:
Lasers and Applications
Krzysztof M. Abramski; Antonio Lapucci; Edward F. Plinski, Editor(s)

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