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Proceedings Paper

Recent results of laser-driven EUV and soft x-rays plasma source at ENEA Frascati
Author(s): P. Di Lazzaro; S. Bollanti; A. Conti; F. Flora; L. Mezi; D. Murra; C. E. Zheng
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Paper Abstract

The XeCl excimer laser Hercules at ENEA Frascati, thanks to its peculiar features, is a unique laser-facility for many irradiation experiments. Among these applications, most machine-time is devoted to drive a laser-plasma source. This laser-plasma source is used for high-resolution atomic spectroscopy, in vivo contact microscopy of biological samples, induced DNA damage, micro-radiography, generation of sub-micron luminescent pattern on Lithium Fluoride films for miniaturized active optical devices. Recently, we equipped the Hercules-driven laser plasma source with a novel Debris Mitigation System to drastically reduce the amount of hot debris emitted by the solid target (potentially dangerous for optics, filters and detectors put near the plasma). Here we will discuss the challenging attempt of stopping debris emitted by our solid-target laser plasma, in order to achieve a clean and efficient EUV source.

Paper Details

Date Published: 11 October 2005
PDF: 9 pages
Proc. SPIE 5958, Lasers and Applications, 595814 (11 October 2005); doi: 10.1117/12.621079
Show Author Affiliations
P. Di Lazzaro, Ctr. Ricerche ENEA Frascati (Italy)
S. Bollanti, Ctr. Ricerche ENEA Frascati (Italy)
A. Conti, Ctr. Ricerche ENEA Frascati (Italy)
F. Flora, Ctr. Ricerche ENEA Frascati (Italy)
L. Mezi, Ctr. Ricerche ENEA Frascati (Italy)
D. Murra, Ctr. Ricerche ENEA Frascati (Italy)
C. E. Zheng, El.En. S.p.A. (Italy)

Published in SPIE Proceedings Vol. 5958:
Lasers and Applications
Krzysztof M. Abramski; Antonio Lapucci; Edward F. Plinski, Editor(s)

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