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Employing Ni-Cr co-doping to prepare low phase transition temperature VO2 film
Author(s): Qicong He; Dongping Zhang; Ying Huang; Yu Yang; Huan Guan; Jingcheng Jin; Ping Fan
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Paper Abstract

A new doping approach of preparing VO2 film was proposed to significantly tune the transition phase temperature. The heavy Ni-Cr-codoped VO2 film ultra-thin layer was deposited on the pure VO2 film by reactive pulsed magnetron sputtering on the Si substrate followed with annealing. The microstructure, optical and phase transition performance of VO2 films were characterized via X-ray diffraction, UV/VIS/NIR spectrophotometer and thin film phase transition measurement system, respectively. The result indicates that the transition phase temperature of VO2 film can be reduced from 53 ℃ to 30 ℃ by easily controlling different doping time.

Paper Details

Date Published: 8 July 2019
PDF: 8 pages
Proc. SPIE 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019), 110640G (8 July 2019); doi: 10.1117/12.2541404
Show Author Affiliations
Qicong He, ShenZhen Univ. (China)
Dongping Zhang, ShenZhen Univ. (China)
Ying Huang, ShenZhen Univ. (China)
Yu Yang, ShenZhen Univ. (China)
Huan Guan, ShenZhen Univ. (China)
Jingcheng Jin, ShenZhen Univ. (China)
Ping Fan, ShenZhen Univ. (China)


Published in SPIE Proceedings Vol. 11064:
Tenth International Conference on Thin Film Physics and Applications (TFPA 2019)
Junhao Chu; Jianda Shao, Editor(s)

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