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Design and fabrication of antireflective surface microstructures on lithium triborate
Author(s): Yong Sun; Fanyu Kong; Yunxia Jin; Yonglu Wang; Yibin Zhang; Hongchao Cao; Hongbo He
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Paper Abstract

This work aims to design and fabricate sub-wavelength structures on lithium triborate surface for increasing its transmittance at 1064 nm. The finite-difference time-domain (FDTD) method is used to discuss the effects of subwavelength structure parameters such as period, depth, duty cycle and shape factor on the reflectivity. The subwavelength surface microstructures are fabricated by interference lithography technique and reactive ion beam etching method. The transmittance of the lithium triborate with single-side sub-wavelength structures is measured by UVvisible- near-infrared spectrophotometer. The results show that the transmittance of the sample with single-side microstructures at 1064 nm is about 4% higher than that of the polished substrate.

Paper Details

Date Published: 8 July 2019
PDF: 7 pages
Proc. SPIE 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019), 110640M (8 July 2019); doi: 10.1117/12.2540603
Show Author Affiliations
Yong Sun, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Key Lab. of Materials for High Power Laser (China)
Fanyu Kong, Shanghai Institute of Optics and Fine Mechanics (China)
Key Lab. of Materials for High Power Laser (China)
Yunxia Jin, Shanghai Institute of Optics and Fine Mechanics (China)
Key Lab. of Materials for High Power Laser (China)
Yonglu Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Key Lab. of Materials for High Power Laser (China)
Yibin Zhang, Shanghai Institute of Optics and Fine Mechanics (China)
Key Lab. of Materials for High Power Laser (China)
Hongchao Cao, Shanghai Institute of Optics and Fine Mechanics (China)
Key Lab. of Materials for High Power Laser (China)
Hongbo He, Shanghai Institute of Optics and Fine Mechanics (China)
Key Lab. of Materials for High Power Laser (China)


Published in SPIE Proceedings Vol. 11064:
Tenth International Conference on Thin Film Physics and Applications (TFPA 2019)
Junhao Chu; Jianda Shao, Editor(s)

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