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Effects of different oxygen flow on refractive index and absorption characteristics of Ta2O5 film
Author(s): Chenghui Jiang; Lishuan Wang; Shida Li; Huasong Liu; Yugang Jiang; Meiping Zhu; Yiqin Ji
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Paper Abstract

Ta2O5 film has low absorption in the range of visible wavelength and it has high refractive index and thermal stability. So it is widely used to prepare low loss films. Ta2O5 single layer with different oxygen flow rates were prepared by ion beam sputtering technique. The refractive index and absorption characteristics of metal oxide films were compared at different oxygen flow rates. The refractive index and absorption of thin film materials were studied by ellipsometry technology and surface thermal lens technology. The results show that: the absorption of Ta2O5 film is decreased first and then increased with the increase of oxygen flow. When oxygen flow is 40 sccm, the absorption is smallest, only 4.4ppm. And the refractive index is decreased with oxygen flow increasing, after oxygen flow reached 40 sccm, the refractive index tend to be stable.

Paper Details

Date Published: 8 July 2019
PDF: 6 pages
Proc. SPIE 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019), 110640Q (8 July 2019); doi: 10.1117/12.2539869
Show Author Affiliations
Chenghui Jiang, Tianjin Jinhang Technical Physics Institute (China)
Joint Lab. of Optoelectronic Materials and Intelligent Surface Structures (China)
Lishuan Wang, Tianjin Jinhang Technical Physics Institute (China)
Joint Lab. of Optoelectronic Materials and Intelligent Surface Structures (China)
Harbin Institute of Technology (China)
Shida Li, Tianjin Jinhang Technical Physics Institute (China)
Joint Lab. of Optoelectronic Materials and Intelligent Surface Structures (China)
Huasong Liu, Tianjin Jinhang Technical Physics Institute (China)
Joint Lab. of Optoelectronic Materials and Intelligent Surface Structures (China)
Yugang Jiang, Tianjin Jinhang Institute of Technical Physics (China)
Joint Lab. of Optoelectronic Materials and Intelligent Surface Structures (China)
Meiping Zhu, Shanghai Institute of Optics and Fine Mechanics (China)
Yiqin Ji, Tianjin Jinhang Institute of Technical Physics (China)
Joint Lab. of Optoelectronic Materials and Intelligent Surface Structures (China)


Published in SPIE Proceedings Vol. 11064:
Tenth International Conference on Thin Film Physics and Applications (TFPA 2019)
Junhao Chu; Jianda Shao, Editor(s)

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