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Efficient method for determination of laser conditions adopted in laser-induced micro-lithology based on laser polymerization size analysis
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Paper Abstract

Since negative photoresist SU-8 has become a common material for multi-photon micro-lithology, it is necessary to study laser conditions adopted in lithology process. Optical transmittance of SU-8 was tested. According to Urbach optical-absorption theory and Gaussian laser lateral spatial intensity envelope, relationship between theory and actual polymerization size of SU-8 was shown. Experimentally, we investigated multi-photon polymerization threshold and laser-induced damage of SU-8 under femtosecond laser irradiation with the pulse width of 45 fs at 800 nm by 1-on-1 tests. The polymerization and damage threshold at 45 fs are 2.7 and 8.9 TW/cm2, respectively. Polymerization and damage morphologies are shown with high contrast and polymerization sizes are measured under SEM. Theoretical polymerization sizes versus laser fluence are calculated by laser-induce multi-photon polymerization size analysis (LMPSA), including Urbach optical-absorption theory and Gaussian laser lateral spatial intensity distribution. The calculated results show that diffusion exists in the femtosecond laser-induced polymerization.

Paper Details

Date Published: 8 July 2019
PDF: 7 pages
Proc. SPIE 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019), 110640R (8 July 2019); doi: 10.1117/12.2539750
Show Author Affiliations
Yuchen Shao, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Key Lab. of Materials for High Power Laser (China)
Yuan'an Zhao, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Key Lab. of Materials for High Power Laser (China)
Hao Ma, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Key Lab. of Materials for High Power Laser (China)
Cheng Li, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Key Lab. of Materials for High Power Laser (China)
Dawei Li, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Key Lab. of Materials for High Power Laser (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Key Lab. of Materials for High Power Laser (China)


Published in SPIE Proceedings Vol. 11064:
Tenth International Conference on Thin Film Physics and Applications (TFPA 2019)
Junhao Chu; Jianda Shao, Editor(s)

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