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Positive and negative properties of laser heat-mode resists
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Paper Abstract

The GeSbTe (GST) thin films are usually used as optical and electronic data recording materials. In this work, the GST thin films were used as both negative and positive resists, and the positive and negative tone pattern structures were fabricated on the GST thin films, accordingly. The GST films were first deposited on the substrate, then the laser exposures were conducted through a focused laser beam spot. For negative resist, a Tetramethyl ammonium hydroxide (TMAH) was used as developing solution. For positive resist, (NH4)2S was used as developing solution. The structure heights of positive and negative resists are 53 nm and 180 nm were obtained, respectively. This work provides an effective method for fabricating the micro/nanostructures of optical and electronic elements.

Paper Details

Date Published: 8 July 2019
PDF: 6 pages
Proc. SPIE 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019), 110640D (8 July 2019); doi: 10.1117/12.2539689
Show Author Affiliations
Guodong Chen, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Kui Zhang, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Zhengwei Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Yang Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Jingsong Wei, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 11064:
Tenth International Conference on Thin Film Physics and Applications (TFPA 2019)
Junhao Chu; Jianda Shao, Editor(s)

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