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Annealing effects on optical and structural properties of TiO2 thin films deposited by ion beam sputtering
Author(s): Yugang Jiang; Jiahuan He; Lishuan Wang; Shida Li; Dan Chen; Meiping Zhu; Huasong Liu
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Paper Abstract

Titanium dioxide (TiO2) thin films have been receiving much attention in the past as their chemical stability and high refractive index. In this paper, TiO2 thin films were prepared on fused silica substrates by ion beam sputtering technique and then are annealed at different temperature. The effects of the annealing temperature on the optical and structural properties of TiO2 thin films were studied. The results show that the refractive index, extinction coefficient of the TiO2 thin film decrease with the increase of annealing temperature. When the annealing temperature is higher than 350°C, the surface of TiO2 thin films shows an uneven mesh crack, which forms a significant film damage. The experimental results indicated that thermal treatment can effectively change the optical properties of the TiO2 thin films.

Paper Details

Date Published: 8 July 2019
PDF: 6 pages
Proc. SPIE 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019), 110640H (8 July 2019); doi: 10.1117/12.2539044
Show Author Affiliations
Yugang Jiang, Tianjin Jinhang Technical Physics Institute (China)
Joint Lab. of Optoelectronic Materials and Intelligent Surface Structures (China)
Jiahuan He, Tianjin Jinhang Technical Physics Institute (China)
Joint Lab. of Optoelectronic Materials and Intelligent Surface Structures (China)
Lishuan Wang, Tianjin Jinhang Technical Physics Institute (China)
Joint Lab. of Optoelectronic Materials and Intelligent Surface Structures (China)
Shida Li, Tianjin Jinhang Technical Physics Institute (China)
Joint Lab. of Optoelectronic Materials and Intelligent Surface Structures (China)
Dan Chen, Tianjin Jinhang Technical Physics Institute (China)
Joint Lab. of Optoelectronic Materials and Intelligent Surface Structures (China)
Meiping Zhu, Shanghai Institute of Optics and Fine Mechanics (China)
Huasong Liu, Tianjin Jinhang Technical Physics Institute (China)
Joint Lab. of Optoelectronic Materials and Intelligent Surface Structures (China)


Published in SPIE Proceedings Vol. 11064:
Tenth International Conference on Thin Film Physics and Applications (TFPA 2019)
Junhao Chu; Jianda Shao, Editor(s)

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