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Proceedings Paper

Ion milled facet for direct coupling to optical waveguides
Author(s): Paul M. Thomas; Michael Fanto; John Serafini; Jeffrey Steidle; Stefan Preble; Tsung-Ju Lu; Dirk Englund
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Paper Abstract

Low loss coupling to optical waveguides is one of the on-going challenges with integrated photonics. Edge coupling of fibers or fiber arrays allows for in principle low loss coupling but strongly depends on the optical facet quality. We demonstrate an innovative strategy utilizing ion milling for polishing photonic integrated circuit edge facets for direct optical coupling to waveguides. Specifically, the authors created a 750 μm wide by 130 μm deep polished facet for coupling SM300 fiber to AlN waveguides on Al2O3 substrates; all capped with an index matched, but highly stressed, SiON cladding. Ion milling avoids the lateral shear forces that can delaminate a stressed film, resulting in scattering sites at the tapered edge coupler/facet interface. The authors demonstrate that a mechanical polish produced chipped facets that scattered the light away from the waveguide, thus requiring reprocessing of the chip. After ion milling, the authors coupled light into the waveguides and demonstrate critical coupling into AlN microring resonators between 390 and 395 nm.

Paper Details

Date Published: 13 May 2019
PDF: 7 pages
Proc. SPIE 10982, Micro- and Nanotechnology Sensors, Systems, and Applications XI, 109823H (13 May 2019); doi: 10.1117/12.2523433
Show Author Affiliations
Paul M. Thomas, Rochester Institute of Technology (United States)
Michael Fanto, Rochester Institute of Technology (United States)
Air Force Research Lab. (United States)
John Serafini, Rochester Institute of Technology (United States)
Jeffrey Steidle, Rochester Institute of Technology (United States)
Stefan Preble, Rochester Institute of Technology (United States)
Tsung-Ju Lu, Massachusetts Institute of Technology (United States)
Dirk Englund, Massachusetts Institute of Technology (United States)


Published in SPIE Proceedings Vol. 10982:
Micro- and Nanotechnology Sensors, Systems, and Applications XI
Thomas George; M. Saif Islam, Editor(s)

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