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Proceedings Paper

Production of high laser induced damage threshold mirror coatings using plasma ion assisted evaporation, plasma assisted reactive magnetron sputtering and ion beam sputtering
Author(s): Alex Ribeaud; Jürgen Pistner; Harro Hagedorn; Matthew Brophy; Pete Kupinski; Jon Watson; Robert Hand
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Paper Abstract

Completing our suite of deposition equipment, we are developing a new Ion Beam Sputtering (IBS) System with different substrate configurations: the High Throughput version (HT) and the High Precision version (HP). The HT version enables the coating of 4 planets of up to 350mm diameter substrates, whereas the HP version allows coating of substrates up to 600mm diameter in a single planet configuration. The IBS system is configured with a Bühler proprietary Optical Monitoring System for layer termination, a large 22cm RF sputtering source, and a LION plasma source for assist. In this presentation the optical performance of this IBS coatings, including LIDT, absorption, total loss and residual coating stress, will be discussed and compared to the other available deposition techniques, such as Plasma Assisted Reactive Magnetron Sputtering, and Plasma Ion Assisted deposition (PIAD). Preliminary results of a 1064nm mirror show less than 5ppm absorption, reflectivity’s of 99.997%, and no visible damage in CW LIDT testing up to 10MW/cm2. Pulsed laser damage testing is in process and will be reported. These results will be compared to the coatings being done using PARMS and Evaporation.

Paper Details

Date Published: 16 November 2018
PDF: 9 pages
Proc. SPIE 10805, Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference, 1080511 (16 November 2018); doi: 10.1117/12.2500354
Show Author Affiliations
Alex Ribeaud, Bühler Alzenau GmbH (Germany)
Jürgen Pistner, Bühler Alzenau GmbH (Germany)
Harro Hagedorn, Bühler Alzenau GmbH (Germany)
Matthew Brophy, Optimax Systems, Inc. (United States)
Pete Kupinski, Optimax Systems, Inc. (United States)
Jon Watson, Optimax Systems, Inc. (United States)
Robert Hand, Optimax Systems, Inc. (United States)

Published in SPIE Proceedings Vol. 10805:
Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference
Christopher Wren Carr; Gregory J. Exarhos; Vitaly E. Gruzdev; Detlev Ristau; M.J. Soileau, Editor(s)

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