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Proceedings Paper

Optical metrology for immersive display components and subsystems
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Paper Abstract

Optical systems for immersive displays incorporate a range of optical components and assemblies that require precision non-contact metrology, including Fizeau interferometry of surface form, new techniques for aspheric microlenses, and interference microscopy for surface structure and texture analysis. Here we consider the problem of evaluating the parallelism and surface form deformation for stacked assemblies of multiple flat glass substrates. Similar structures are common for RGB planar waveguides with slanted sub-wavelength gratings acting as in- and out-couplers. In our experiments, we demonstrate the effectiveness of coherence scanning over a large aperture area using an 100-mm aperture white-light interferometer.

Paper Details

Date Published: 21 May 2018
PDF: 6 pages
Proc. SPIE 10676, Digital Optics for Immersive Displays, 106760B (21 May 2018); doi: 10.1117/12.2317985
Show Author Affiliations
Peter J. de Groot, Zygo Corp. (United States)
Leslie L. Deck, Zygo Corp. (United States)

Published in SPIE Proceedings Vol. 10676:
Digital Optics for Immersive Displays
Bernard C. Kress; Wolfgang Osten; Hagen Stolle, Editor(s)

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