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Proceedings Paper

Functional tolerancing using full surface metrology
Author(s): Robert D. Grejda; Katherine Ballman; Chris A. Lee
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Paper Abstract

This paper highlights two examples of the use of full surface metrology to allow for functional tolerancing of components in the areas of EUV lithography (reticle characterization) and DUV precision lens manufacturing (lens holder metrology). For both examples, the measurement of the full surface is a key enabler to understanding the critical characteristics to control and tolerance for functionality or performance. Interferometric techniques are used to provide high resolution and accurate measurements for both examples. Subsequently, this data can be used to identify the surface characteristics that contribute to the end functionality and provide a means for deterministic correction or compensation.

Paper Details

Date Published: 28 May 2018
PDF: 12 pages
Proc. SPIE 10695, Optical Instrument Science, Technology, and Applications, 106950G (28 May 2018); doi: 10.1117/12.2312199
Show Author Affiliations
Robert D. Grejda, Corning Tropel Corp. (United States)
Katherine Ballman, Corning Tropel Corp. (United States)
Chris A. Lee, Corning Tropel Corp. (United States)


Published in SPIE Proceedings Vol. 10695:
Optical Instrument Science, Technology, and Applications
Nils Haverkamp; Richard N. Youngworth, Editor(s)

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