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Proceedings Paper

Real-time high-speed motion blur compensation method using galvanometer mirror for shape sensing of microfabricated objects
Author(s): Kenichi Murakami; Tomohiko Hayakawa; Jerome Pitogo de Leon; Masatoshi Ishikawa
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Paper Abstract

In this paper, motion-blur compensation method for micro fabricated objects using a galvanometer mirror with back-and-forth rotation is proposed. Motion-blur compensation is expected to extend exposure time without motion blur because longer exposure time can decrease the intensity of illumination to avoid shape expansion of a target object by heat of illumination. Dealing with this demand, a galvanometer mirror is installed between the target and a 2D high-speed camera, and controls the optical axis of the camera to follow the moving target. Each continuous images are taken during the motion of the stage, and finally taken images are integrated into one image by patching for detecting fabrication error using image processing. The experimental system that consists of a high-speed camera, a galvanometer mirror and a high-precision stage is developed and a 20mm=/s moving drilled silicon nitride sheet having holes of about 40 μm in diameter are lattice-shaped at a pitch of 60 μm is captured without motion blur by using this system. Comparing captured images with still images in diameter, roundness and curvature of the each holes, the effectiveness of this system is validated.

Paper Details

Date Published: 24 May 2018
PDF: 6 pages
Proc. SPIE 10679, Optics, Photonics, and Digital Technologies for Imaging Applications V, 106790Z (24 May 2018); doi: 10.1117/12.2306621
Show Author Affiliations
Kenichi Murakami, The Univ. of Tokyo (Japan)
Tomohiko Hayakawa, The Univ. of Tokyo (Japan)
Jerome Pitogo de Leon, The Univ. of Tokyo (Japan)
Masatoshi Ishikawa, The Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 10679:
Optics, Photonics, and Digital Technologies for Imaging Applications V
Peter Schelkens; Touradj Ebrahimi; Gabriel Cristóbal, Editor(s)

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