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Proceedings Paper

How reduced vacuum pumping capability in a coating chamber affects the laser damage resistance of HfO[sub]2[/sub]/SiO[sub]2[/sub] antireflection and high-reflection coatings
Author(s): Ella S. Field; John C. Bellum; Damon E. Kletecka
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Paper Abstract

Optical coatings with the highest laser damage thresholds rely on clean conditions in the vacuum chamber during the coating deposition process. A low base pressure in the coating chamber, as well as the ability of the vacuum system to maintain the required pressure during deposition, are important aspects of limiting the amount of defects in an optical coating that could induce laser damage. Our large optics coating chamber at Sandia National Laboratories normally relies on three cryo pumps to maintain low pressures for e-beam coating processes. However, on occasion, one or more of the cryo pumps have been out of commission. In light of this circumstance, we decided to explore how deposition under compromised vacuum conditions resulting from the use of only one or two cryo pumps affects the laser-induced damage thresholds of optical coatings. The coatings of this study consist of HfO2 and SiO2 layer materials and include antireflection coatings for 527 nm at normal incidence, and high reflection coatings for 527 nm, 45° angle of incidence (AOI), in P-polarization (P-pol).

Paper Details

Date Published: 23 November 2015
PDF: 10 pages
Proc. SPIE 9632, Laser-Induced Damage in Optical Materials: 2015, 963219 (23 November 2015); doi: 10.1117/12.2194131
Show Author Affiliations
Ella S. Field, Sandia National Labs. (United States)
John C. Bellum, Sandia National Labs. (United States)
Damon E. Kletecka, Sandia National Labs. (United States)

Published in SPIE Proceedings Vol. 9632:
Laser-Induced Damage in Optical Materials: 2015
Gregory J. Exarhos; Vitaly E. Gruzdev; Joseph A. Menapace; Detlev Ristau; MJ Soileau, Editor(s)

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