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Proceedings Paper

3D optical metrology and super-resolution microscopy with structured illumination based on QXGA (2048x1536) resolution
Author(s): Henning Molsen
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Paper Abstract

Structured Illumination has gained wide use in 3D optical metrology systems and 3D Super-Resolution Microscopy (SRM). Both applications use a spatial light modulator (SLM) to project a series of complex images onto the surface of a device-under-test [1] and into biological samples, respectively [2, 3]. In 3D optical metrology a camera-based inspection system is used to assess these images and calculate an accurate 3D profile. In 3D-SRM, the fluorescent emission from specific markers is detected to reconstruct biological structures below 250 nm. This paper outlines the features of Forth Dimension Displays’ new 3.1 MPixel SLM and driver solution and describes design aspects for its application in structured illumination.

Paper Details

Date Published: 22 June 2015
PDF: 7 pages
Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 952506 (22 June 2015); doi: 10.1117/12.2184774
Show Author Affiliations
Henning Molsen, Forth Dimension Displays Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 9525:
Optical Measurement Systems for Industrial Inspection IX
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)

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