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Proceedings Paper

A new class of wide-field objectives for 3D interference microscopy
Author(s): Peter J. de Groot; James F. Biegen
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Paper Abstract

We propose a new type of interference objective that makes use of two partially-reflective beamsplitter plates arranged coaxially with the objective lens system, in an assembly that is better suited to large fields of view than the traditional Michelson design. The coaxial plates are slightly tilted to direct unwanted reflections outside of the imaging pupil aperture, providing high fringe contrast with spectrally-broadband, spatially extended white light illumination. Examples include a turret-mountable 1.4× magnification objective parfocal with high-magnification objectives up to 100×, and a dovetail mount 0.5× objective with a 34×34mm field for wide-field measurements of surface form.

Paper Details

Date Published: 22 June 2015
PDF: 7 pages
Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 95250N (22 June 2015); doi: 10.1117/12.2183628
Show Author Affiliations
Peter J. de Groot, Zygo Corp. (United States)
James F. Biegen, Zygo Corp. (United States)

Published in SPIE Proceedings Vol. 9525:
Optical Measurement Systems for Industrial Inspection IX
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)

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