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Proceedings Paper

Multiple height calibration reference for nano-metrology
Author(s): M. Christophersen; B. F. Phlips; A. J. Boudreau; M. K. Yetzbacher
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Paper Abstract

Modern nano-metrology instruments require calibration references with nanometer accuracy in the x, y, and z directions. A common problem is the accurate calibration in the z direction (height). For example, it is generally not difficult to obtain accurate x- and y- calibration references for a Scanning Probe Microscope (SPM). It is, however, much more difficult to obtain accurate z-axis results. It is difficult to control z-axis piezo dynamics because during scanning in the xy-plane the x-and y-axes move at a constant rate whiles the z axis does not. Furthermore due to the high cost of producing calibration standards, the microscope is often calibrated at only one height. However, if the relationship between the measured z height and the actual z height is not linear, then the height measurements will not be correct. In this paper, we will present a method for the fabrication of calibration references with: (i) sub-10 nm features and (ii) multiple step heights on one reference, allowing for better calibration of the non-linearity in the z direction.

Paper Details

Date Published: 19 March 2015
PDF: 11 pages
Proc. SPIE 9424, Metrology, Inspection, and Process Control for Microlithography XXIX, 94240R (19 March 2015); doi: 10.1117/12.2085502
Show Author Affiliations
M. Christophersen, U.S. Naval Research Lab. (United States)
B. F. Phlips, U.S. Naval Research Lab. (United States)
A. J. Boudreau, U.S. Naval Research Lab. (United States)
M. K. Yetzbacher, U.S. Naval Research Lab. (United States)

Published in SPIE Proceedings Vol. 9424:
Metrology, Inspection, and Process Control for Microlithography XXIX
Jason P. Cain; Martha I. Sanchez, Editor(s)

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