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Proceedings Paper

Simplified design of diaphragm-based fiber optic extrinsic Fabry-Perot accelerometer
Author(s): Zhaogang Wang; Wentao Zhang; Jing Han; Wenzhu Huang; Fang Li
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Paper Abstract

A fiber optic Fabry-Perot accelerometer (FOFPA) with diaphragm-mass-collimator (DMC) gathered structure is presented. This design makes the structure more compacts and the manufacturing process more controllable. The operation principle based on Fabry-Perot interference is described. Several tests using intensity demodulation scheme which can control the working point of FOFPA were carried out. Experimental results show that: axis sensitivity of the proposed FOFPA is 36.07 dB (re: 0 dB=1 V/g) with a fluctuation less than 0.9 dB in a frequency bandwidth of 10-125 Hz, the resonant frequency is about 350 Hz, measurement range is about 70 dB@100 Hz. which are much close to theoretical values

Paper Details

Date Published: 17 November 2014
PDF: 6 pages
Proc. SPIE 9274, Advanced Sensor Systems and Applications VI, 927417 (17 November 2014); doi: 10.1117/12.2071061
Show Author Affiliations
Zhaogang Wang, Institute of Semiconductors (China)
Wentao Zhang, Institute of Semiconductors (China)
Jing Han, Institute of Semiconductors (China)
Wenzhu Huang, Institute of Semiconductors (China)
Fang Li, Institute of Semiconductors (China)

Published in SPIE Proceedings Vol. 9274:
Advanced Sensor Systems and Applications VI
Tiegen Liu; Shibin Jiang; Niels Neumann, Editor(s)

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