
Proceedings Paper
Monolithic CMOS-MEMS integration for high-g accelerometersFormat | Member Price | Non-Member Price |
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Paper Abstract
This paper highlights work-in-progress towards the conceptualization, simulation, fabrication and initial testing of a silicon-germanium (SiGe) integrated CMOS-MEMS high-g accelerometer for military, munition, fuze and shock measurement applications. Developed on IMEC’s SiGe MEMS platform, the MEMS offers a dynamic range of 5,000 g and a bandwidth of 12 kHz. The low noise readout circuit adopts a chopper-stabilization technique implementing the CMOS through the TSMC 0.18 µm process. The device structure employs a fully differential split comb-drive set up with two sets of stators and a rotor all driven separately. Dummy structures acting as protective over-range stops were designed to protect the active components when under impacts well above the designed dynamic range.
Paper Details
Date Published: 31 October 2014
PDF: 10 pages
Proc. SPIE 9254, Emerging Technologies in Security and Defence II; and Quantum-Physics-based Information Security III, 925410 (31 October 2014); doi: 10.1117/12.2070667
Published in SPIE Proceedings Vol. 9254:
Emerging Technologies in Security and Defence II; and Quantum-Physics-based Information Security III
Keith L. Lewis; Mark T. Gruneisen; Miloslav Dusek; Richard C. Hollins; Thomas J. Merlet; John G. Rarity; Alexander Toet, Editor(s)
PDF: 10 pages
Proc. SPIE 9254, Emerging Technologies in Security and Defence II; and Quantum-Physics-based Information Security III, 925410 (31 October 2014); doi: 10.1117/12.2070667
Show Author Affiliations
Vinayak Narasimhan, Nanyang Technological Univ. (Singapore)
Holden Li, Nanyang Technological Univ. (Singapore)
Holden Li, Nanyang Technological Univ. (Singapore)
Chuan Seng Tan, Nanyang Technological Univ. (Singapore)
Published in SPIE Proceedings Vol. 9254:
Emerging Technologies in Security and Defence II; and Quantum-Physics-based Information Security III
Keith L. Lewis; Mark T. Gruneisen; Miloslav Dusek; Richard C. Hollins; Thomas J. Merlet; John G. Rarity; Alexander Toet, Editor(s)
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