3 Silicon as a mechanical material Kurt E. Petersen (Proceedings of the IEEE 1982)

41 Silicon micromechanics: sensors and actuators on a chip Roger T. Howe, Richard S. Muller, Kaigham J. Gabriel, William S.N. Trimmer (IEEE Spectrum 1990)

46 Microfabricated hinges K.S.J. Pister, M.W. Judy, S.R. Burgett, R.S. Fearing (Sensors and Actuators A: Physical 1992)

54 Micromachines on the march Janusz Bryzek, Kurt Petersen, Wendell McCulley (IEEE Spectrum 1994)

66 Micro-opto-electro-mechanical systems M. Edward Motamedi (Optical Engineering 1994)

79 Micromachined free-space integrated micro-optics M.C. Wu, L.-Y. Lin, S.-S. Lee, K.S.J. Pister (Sensors and Actuators A: Physical 1995)

87 Application of micromachining technology to optical devices and systems Hiroyuki Fujita (in Micromachining and Microfabrication Process Technology II, S.W. Pang, S.-C. Chang, editors, 1996)

97 Micro-opto-electro-mechanical devices and on-chip optical processing M. Edward Motamedi, Ming C. Wu, Kristofer S.J. Pister (Optical Engineering 1997)

115 Commercial CMOS foundry thermal display for dynamic thermal scene simulation Michael Gaitan, M. Parameswaran, R. Barry Johnson, Ronald Chung (in Infrared Imaging Systems: Design, Analysis, Modeling, and Testing IV, G.C. Holst, editor, 1993)

122 128x128 deformable mirror device Larry J. Hornbeck (IEEE Transactions on Electron Devices 1983)

129 A multiplexed silicon infrared thermal imager Wayne G. Baer, Terry Hull, Kevin D. Wise, Khalil Najafi, Kensall D. Wise (in Transducers '91, International Conference on Solid-State Sensors and Actuators 1991)

133 Deformable-mirror spatial light modulators Larry J. Hornbeck (in Spatial Light Modulators and Applications III, U. Efron, editor, 1989)

150 Mirrors on a chip Jack M. Younse (IEEE Spectrum 1993)

155 Fabrication and characterization of a micromachined deformable mirror for adaptive optics applications Linda M. Miller, Michael L. Agronin, Randall K. Bartman, William J. Kaiser, Thomas W. Kenny, Robert L. Norton, Erika C. Vote (in Space Astronomical Telescopes and Instruments II, P.Y. B�ly, J.B. Breckinridge, editors, 1993)

165 Line-addressable torsional micromirrors for light modulator arrays V.P. Jaecklin, C. Linder, N.F. de Rooij, J.-M. Moret, R. Vuilleumier (Sensors and Actuators A: Physical 1994)

171 Deformable grating light valves for high resolution displays Raj B. Apte, Francisco S.A. Sandejas, William C. Banyai, David M. Bloom (in Solid-State Sensor and Actuator Workshop 1994)

177 512x512 infrared scene projector array for low-background simulations B.E. Cole, C.-J. Han, R.E. Higashi, J. Ridley, J. Holmen, J. Anderson, D. Nielsen, H. Marsh, K. Newstrom, C. Zins, P. Wilson, K. Beaudoin (in Solid-State Sensor and Actuator Workshop 1994)

183 Implementation and characterization of a flexure-beam micromechanical spatial light modulator Tsen-Hwang Lin (Optical Engineering 1994)

189 Digital micromirror device imaging bar for hardcopy W.E. Nelson, Rohit L. Bhuva (in Color Hard Copy and Graphic Arts IV, J. Bares, editor, 1995)

197 Advanced modeling of micromirror devices M. Adrian Michalicek, Darren E. Sene, Victor M. Bright (in International Conference on Integrated Micro/Nanotechnology for Space Applications 1995)

213 High speed interferometric device for real-time correction of aero-optic effects Rod Clark, John Karpinsky, Gregg Borek, Eric Johnson (in 26th AIAA Plasmadynamics and Lasers Conference 1995)

224 Implementation of hexagonal micromirror arrays as phase-mostly spatial light modulators John H. Comtois, Victor M. Bright, Steven C. Gustafson, M. Adrian Michalicek (in Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications, W. Bailey, M.E. Motamedi, F.-C. Luo, editors, 1995)

236 Projection display systems based on the Digital Micromirror Device (DMD) Jack M. Younse (in Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications, W. Bailey, M.E. Motamedi, F.-C. Luo, editors, 1995)

248 A method for designing electrostatic-actuator electrode pattern in micromachined deformable mirrors P.K.C. Wang, R.C. Gutierrez, R.K. Bartman (Sensors and Actuators A: Physical 1996)

255 Deformable micromirror devices as phase-modulating high-resolution light valves H. K�ck, W. Doleschal, A. Gehner, W. Grundke, R. Melcher, J. Paufler, R. Seltmann, G. Zimmer (Sensors and Actuators A: Physical 1996)

261 Micro-opto-electro-mechanical (MOEM) adaptive optic system Rodney L. Clark, John R. Karpinsky, Jay A. Hammer, Roland Anderson, Randall Lindsey, Dan Brown, Paul Merritt (in Miniaturized Systems with Micro-Optics and Micromechanics II, M.E. Motamedi, L.J. Hornbeck, K.S.J. Pister, editors, 1997)

274 Development of microelectromechanical deformable mirrors for phase modulation of light Raji Krishnamoorthy Mali, Thomas G. Bifano, Nelsimar Vandelli, Mark N. Horenstein (Optical Engineering 1997)

281 Continuous-membrane surface-micromachined silicon deformable mirror Thomas G. Bifano, Raji Krishnamoorthy Mali, John Kyle Dorton, Julie Perreault, Nelsimar Vandelli, Mark N. Horenstein, David A. Casta�on (Optical Engineering 1997)

288 Use of micro-electro-mechanical deformable mirrors to control aberrations in optical systems: theoretical and experimental results Michael C. Roggemann, Victor M. Bright, Byron M. Welsh, Shaun R. Hick, Peter C. Roberts, William D. Cowan, John H. Comtois (Optical Engineering 1997)

301 Aberration-correction results from a segmented microelectromechanical deformable mirror and a refractive lenslet array Max K. Lee, William D. Cowan, Byron M. Walsh, Victor M. Bright, Michael C. Roggemann (Optics Letters 1998)

304 Technology and applications of micromachined silicon adaptive mirrors Gleb Vdovin, Simon Middelhoek, Pasqualina M. Sarro (Optical Engineering 1997)

313 Thermally actuated piston micromirror arrays William D. Cowan, Victor M. Bright (in Optical Scanning Systems: Design and Applications, L. Beiser, S.F. Sagan, editors, 1997)

327 The development of polysilicon micromotors for optical scanning applications K. Deng, H. Miyajima, V.R. Dhuler, M. Mehregany, S.W. Smith, F.L. Merat, S. Furukawa (in Solid-State Sensor and Actuator Workshop 1994)

332 Diffraction grating scanners using polysilicon micromotors A.A. Yasseen, S.W. Smith, M. Mehregany, F.L. Merat (in IEEE 8th International Workshop on Micro Electro Mechanical Systems 1995)

338 Surface-micromachined free-space micro-optical systems containing three- dimensional microgratings S.S. Lee, L.Y. Lin, M.C. Wu (Applied Physics Letters 1995)

341 2-dimensional optical scanner applying a torsional resonator with 2 degrees of freedom Yoshinori Ohtuka, Hideaki Nishikawa, Tsukasa Koumura, Tadashi Hattori (in IEEE 8th International Workshop on Micro Electro Mechanical Systems 1995)

345 Out-of-plane refractive microlens fabricated by surface micromachining C.R. King, L.Y. Lin, M.C. Wu (IEEE Photonics Technology Letters 1996)

348 Surface-micromachined mirrors for laser-beam positioning N.C. Tien, O. Solgaard, M.-H. Kiang, M. Daneman, K.Y. Lau, R.S. Muller (Sensors and Actuators A: Physical 1996)

353 Linear vibromotor-actuated micromachined microreflector for integrated optical systems Michael J. Daneman, Norman C. Tien, Olav Solgaard, Kam Y. Lau, Richard S. Muller (in Solid-State Sensor and Actuator Workshop 1996)

357 Surface-micromachined electrostatic-comb driven scanning micromirrors for barcode scanners Meng-Hsiung Kiang, Olav Solgaard, Richard S. Muller, Kam Y. Lau (in IEEE 9th Annual International Workshop on Micro Electro Mechanical Systems 1996)

363 Polysilicon micromechanical gratings for optical modulation D.E. Sene, V.M. Bright, J.H. Comtois, J.W. Grantham (Sensors and Actuators A: Physical 1996)

370 Arrays of thermal micro-actuators coupled to micro-optical components J. Robert Reid, Victor M. Bright, John H. Comtois (in Actuator Technology and Applications, A.E. Hatheway, editor, 1996)

379 Microactuated micro-XYZ stages for free-space micro-optical bench L.Y. Lin, J.L. Shen, S.S. Lee, G.D. Su, M.C. Wu (in MEMS '97, IEEE 10th Annual International Workshop on Micro Electro Mechanical Systems 1997)

385 Micro-electro-mechanical variable blaze gratings D.M. Burns, V.M. Bright (in MEMS '97, IEEE 10th Annual International Workshop on Micro Electro Mechanical Systems 1997)

392 Two-dimensional miniature optical-scanning sensor with silicon micromachined scanning mirror Masaaki Ikeda, Hiroshi Goto, Hiromi Totani, Minoru Sakata, Tuneji Yada (in Miniaturized Systems with Micro-Optics and Micromechanics II, M.E. Motamedi, L.J. Hornbeck, K.S.J. Pister, editors, 1997)

404 Scanning and rotating micromirrors using thermal actuators Jeffrey T. Butler, Victor M. Bright, J. Robert Reid (in Optical Scanning Systems: Design and Applications, L. Beiser, S.F. Sagan, editors, 1997)

415 Micromachined electromagnetic scanning mirrors Raanan A. Miller, Yu-Chong Tai (Optical Engineering 1997)

424 Self-assembled microactuated XYZ stages for optical scanning and alignment Li Fan, Ming C. Wu, Kent D. Choquette, Mary H. Crawford (in Transducers '97, International Conference on Solid-State Sensors and Actuators 1997)

428 Actuated polysilicon micromirrors for raster-scanning displays Meng-Hsiung Kiang, Dan A. Francis, Connie J. Chang-Hasnain, Olav Solgaard, Kam Y. Lau, Richard S. Muller (in Transducers '97, International Conference on Solid-State Sensors and Actuators 1997)

435 Integrated grating/detector array fabricated in silicon using micromachining techniques T.A. Kwa, R.F. Wolffenbuttel (Sensors and Actuators A: Physical 1992)

443 Miniaturized spectrometers for biochemical analysis Gaylin M. Yee, Paul A. Hing, Nadim I. Maluf, Gregory T.A. Kovacs (in Solid-State Sensor and Actuator Workshop 1996)

447 Tunable IR filters with integral electromagnetic actuators T.R. Ohnstein, J.D. Zook, H.B. French, H. Guckel, T. Earles, J. Klein, P. Mangat (in Solid-State Sensor and Actuator Workshop 1996)

451 Optical performance of high-aspect LIGA gratings J. Allen Cox, J. David Zook, Thomas Ohnstein, David C. Dobson (Optical Engineering 1997)

458 Surface-micromachined diffraction gratings for scanning spectroscopic applications Meng-Hsiung Kiang, Jocelyn T. Nee, Kam Y. Lau, Richard S. Muller (in Transducers '97, International Conference on Solid-State Sensors and Actuators 1997)

463 Microactuators for aligning optical fibers R. Jebens, W. Trimmer, J. Walker (Sensors and Actuators A: Physical 1989)

472 Miniature Fabry-Perot interferometers micromachined in silicon for use in optical fiber WDM systems J.H. Jerman, D.J. Clift (in Transducers '91, International Solid- State Conference on Sensors and Actuators 1991)

476 Microchopper-modulated IR microlamp Peter Y. Chen, Richard S. Muller (in Solid-State Sensor and Actuator Workshop 1994)

480 Microfabricated optical chopper Michael T. Ching, Reid A. Brennen, Richard M. White (Optical Engineering 1994)

489 Surface micromachined tuneable interferometer array K. Aratani, P.J. French, P.M. Sarro, D. Poenar, R.F. Wolffenbuttel, S. Middelhoek (Sensors and Actuators A: Physical 1994)

496 Micro-opto-mechanical devices fabricated by anisotropic etching of (110) silicon Yuji Uenishi, Masahiro Tsugai, Mehran Mehregany (Journal of Micromechanics and Microengineering 1995)

504 A piezoelectrically operated optical chopper by quartz micromachining Hiroshi Toshiyoshi, Hiroyuki Fujita, Toshitsugu Ueda (Journal of Microelectromechanical Systems 1995)

511 Fabrication of a mechanical antireflection switch for fiber-to-the-home systems James A. Walker, Keith W. Goossen, Susanne C. Arney (Journal of Microelectromechanical Systems 1996)

518 Megahertz opto-mechanical modulator C. Marxer, M.A. Gr�tillat, V.P. Jaecklin, R. Baettig, O. Anthamatten, P. Vogel, N.F. de Rooij (Sensors and Actuators A: Physical 1996)

523 Tunable three-dimensional solid Fabry-Perot etalons fabricated by surface-micromachining L.Y. Lin, J.L. Shen, S.S. Lee, M.C. Wu, A.M. Sergent (IEEE Photonics Technology Letters 1996)

526 Surface micromachined Fabry-Perot tunable filter A.T.T.D. Tran, Y.H. Lo, Z.H. Zhu, D. Haronian, E. Mozdy (IEEE Photonics Technology Letters 1996)

529 Optically excited self-resonant microbeams J. David Zook, David W. Burns, William R. Herb, Henry Guckel, Joon- Won Kang, Yongchul Ahn (Sensors and Actuators A: Physical 1996)

536 Micromachined 1x2 optical-fiber switch Leslie A. Field, Diane L. Burriesci, Peter R. Robrish, Richard C. Ruby (Sensors and Actuators A: Physical 1996)

541 Micro-optical and opto-mechanical systems fabricated by the LIGA technique J�rgen Mohr, Jost G�ttert, Andr� M�ller, Patrick Ruther, Klaus Wengeling (in Miniaturized Systems with Micro-Optics and Micromechanics II, M.E. Motamedi, L.J. Hornbeck, K.S.J. Pister, editors, 1997)

547 The potential of transmittive microoptical systems for miniaturized scanners, modulators and switches Rolf G�ring, Steffen Gl�ckner (in Miniaturized Systems with Micro- Optics and Micromechanics II, M.E. Motamedi, L.J. Hornbeck, K.S.J. Pister, editors, 1997)

559 Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications C. Marxer, Christian Thio, M.-A. Gr�tillat, N.F. de Rooij, R. B�ttig, O. Anthamatten, B. Valk, P. Vogel (Journal of Microelectromechanical Systems 1997)

568 Optical communication using micro corner cube reflectors Patrick B. Chu, Nanping R. Lo, Erik C. Berg, Kristofer S.J. Pister (in MEMS '97, 10th IEEE International Workshop on Micro Electro Mechanical Systems 1997)

574 Microjoinery for optomechanical systems C. Gonzalez, R.J. Welty, R.L. Smith, S.D. Collins (in Miniaturized Systems with Micro-Optics and Micromechanics II, M.E. Motamedi, L.J. Hornbeck, K.S.J. Pister, editors, 1997)

582 A micro shutter for applications in optical and thermal detectors Th. Kraus, M. Baltzer, E. Obermeier (in Transducers '97, International Conference on Solid-State Sensors and Actuators 1997)

586 Surface-micromachined free-space fiber optic switches with integrated microactuators for optical fiber communication systems Shi-Sheng Lee, Ed Motamedi, Ming C. Wu (in Transducers '97, International Conference on Solid-State Sensors and Actuators 1997)

590 An electromagnetic MEMS 2x2 fiber optic bypass switch Raanan A. Miller, Yu-Chong Tai, Guoda Xu, John Bartha, Freddie Lin (in Transducers '97, International Conference on Solid-State Sensors and Actuators 1997)

594 Micro-optical gate for fiber optic communication Etsu Hashimoto, Yuji Uenishi, Kazuharu Honma, Shinji Nagaoka (in Transducers '97, International Conference on Solid-State Sensors and Actuators 1997)

601 Silicon-micromachined micromirrors with integrated high-precision actuators for external-cavity semiconductor lasers Meng-Hsiung Kiang, Olav Solgaard, Richard S. Muller, Kam Y. Lau (IEEE Photonics Technology Letters 1996)

604 Widely and continuously tunable micromachined resonant cavity detector with wavelength tracking M.S. Wu, E.C. Vail, G.S. Li, W. Yuen, C.J. Chang-Hasnain (IEEE Photonics Technology Letters 1996)

607 Wide and continuous wavelength tuning in a vertical-cavity surface- emitting laser using a micromachined deformable-membrane mirror M.C. Larson, J.S. Harris, Jr. (Applied Physics Letters 1996)

610 InP-based micro-mechanical tunable and selective photodetector for WDM systems C. Seassal, J.L. Leclercq, X. Letartre, A. Gagnaire, M. Gendry, P. Viktorovitch, J.P. Lain�, F. Sidoroff, R. Ledantec, C. Miu, T. Benyattou, G. Guillot, D. Rondi, R. Blondeau (in Miniaturized Systems with Micro-Optics and Micromechanics II, M.E. Motamedi, L.J. Hornbeck, K.S.J. Pister, editors, 1997)

616 Surface micromachined long wavelength LED/photodetector with a continuous tuning range of 75 nm G.L. Christenson, A.T.T.D. Tran, Z.H. Zhu, Y.H. Lo, M. Hong, M.P. Mannaerts, R. Bhat (in MEMS '97, IEEE 10th Annual International Workshop on Micro Electro Mechanical Systems 1997)