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Spie Press Book

Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication
Editor(s): Prosenjit Rai-Choudhury
Format Member Price Non-Member Price

Book Description

This handbook contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Eleven chapters cover key aspects of micromachining and microfabrication, including numerous device applications.

Book Details

Date Published: 6 October 1997
Pages: 700
ISBN: 9780819423795
Volume: PM40

Table of Contents
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Preface

1 Micromachining and Trends for the Twenty-First Century
Paul J. McWhorter, A. Bruno Frazier, P. Rai-Choudhury

2 Wet Chemical Etching of Silicon and SiO2, and Ten Challenges for Micromachiners
Don L. Kendall and Robert A. Shoultz

3 Applications of Dry Etching to Microsensors, Field Emitters, and Optical Devices
Stella Pang

4 Focused Ion Beams for Micromachining and Microchemistry
Diane K. Stewart and J. David Casey, Jr.

5 Plating Techniques
Lubomyr T. Romankiw and Eugene J.M. O'Sullivan

6 High-Aspect-Ratio Processing
Craig Friedrich, Robert Warrington, Philip J. Coane, Walter Bacher, Werner Bauer, Philip J. Coane, Jost G�ttert, Thomas Hanemann, J�rgen Hau�elt, Mathias Heckele, Regina Knitter, J�rgen Mohr, Volker Piotter, Hans-Joachim Ritzhaupt-Kleissl, Robert Ruprecht

7 Sensors and Actuators
Hal Jerman and Stephen Terry

8 Micro-optical Devices
Hiroyuki Fujita, Hiroshi Toshiyoshi

9 Micromachined Systems for Neurophysiological Applications
Khalil Najafi

10 Thin-Film-Transistor-Addressed Liquid Crystal Displays
Fang-Chen Luo

11 Microsensors, Actuators, MEMS and Electronics for Smart Structures
Vijay K. Varadan and Vasundara V. Varadan

Index


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