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Micro/Nano Lithography (25)

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Optical Physics for Nanolithography
EUV Lithography, Second Edition
Member: $102.00
Non-member: $120.00
3D IC Devices, Technologies, and Manufacturing
Member: $56.10
Non-member: $66.00
Design Technology Co-Optimization in the Era of Sub-Resolution IC Scaling
Molecular Theory of Lithography
Member: $78.20
Non-member: $92.00
Introduction to Metrology Applications in IC Manufacturing
Field Guide to Displacement Measuring Interferometry
Introduction to Semiconductor Manufacturing Technology, Second Edition
Principles of Lithography, Third Edition
Member: $86.70
Non-member: $102.00
Chemistry and Lithography
Member: $102.85
Non-member: $121.00
Optical Lithography: Here Is Why
Member: $78.20
Non-member: $92.00
Advanced Processes for 193-nm Immersion Lithography
EUV Sources for Lithography
Member: $147.90
Non-member: $174.00
Field Guide to Optical Lithography
Member: $35.70
Non-member: $42.00
Optical Imaging in Projection Microlithography
Selected Papers on Multiphoton Excitation Microscopy
Resolution Enhancement Techniques in Optical Lithography
Lithography Process Control
Member: $44.20
Non-member: $52.00
Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication
Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography
Diazonaphthoquinone-based Resists
Member: $44.20
Non-member: $52.00
Image Formation in Low-Voltage Scanning Electron Microscopy
Ludwig Reimer
Member: $41.65
Non-member: $49.00
Butrus T. Khuri-Yakub, Calvin F. Quate
Member: $84.15
Non-member: $99.00
Excimer Laser Lithography
Member: $41.65
Non-member: $49.00
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