Sign In to send a private message or view contact details
Profile Summary
Minoru Toriumi received his ph. D. in Chemistry from Tokyo Institute of Technology in 1984. He has studied the photoresists materials at Hitachi Central Research Laboratory, Daikin Industries, Ltd. and Osaka University. He presides over Laboratory for Interdisciplinary Science and Technology to study resist materials and applications of the free electron laser at Tokyo University of Science.
Upcoming Presentations
Most Recent |
Show All
Retrieving Data, please wait...
Publications
Most Recent |
Show All
Retrieving Data, please wait...
Conference Committee Involvement
Most Recent |
Show All
Retrieving Data, please wait...
Course Instructor
Most Recent |
Show All
Retrieving Data, please wait...
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to premium articles and original research