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SPIE Journals OPEN ACCESS

Micro/Nano Lithography

What Could Kill – and Save – Moore’s Law

An as-yet-unsolved murder mystery.

AL19Crowd3_detail

Confronting "the triangle of death."

1 March 2019
SPIE Advanced Lithography 2018 Plenary

Design, process, and technology need to be optimized together.

1 March 2019
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Neural networks may detetect killer defects.

28 February 2019
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"A human hair is huge."

27 February 2019
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Stochastics-limited lithography forces some unpleasant tradeoffs.

27 February 2019
 
J. Alexander Liddle: Metrology at the nanoscale key to understanding of next generation lithography processes