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SPIE Advanced Lithography 2019| Call for Papers

SPIE Journals OPEN ACCESS

Micro/Nano Lithography

Understanding EUV Lithography: The technology that enables extension of Moore’s Law

There is much to learn about EUVL in the recently published SPIE Press Book, EUV Lithography.

Jennifer Douris O’Bryan

The US Trade Representative has announced a process for US companies to request permission to continue importing targeted items on a duty-free basis.

(Updated)

7 September 2018
SPIE CEO Kent Rochford

SPIE's new CEO Kent Rochford, formerly of NIST, stepped into his new role 1 June. We asked Rochford to discuss his views on SPIE and the world of optics and photonics.

11 June 2018
SPIE PW orange

An industry panel at SPIE Photonics West 2018 discusses the future of additive manufacturing.

28 March 2018
SPIE Women in Optics logo

A Women in Optics presentation from SPIE Photonics West 2018.

22 March 2018
SPIE PW orange

An interview from SPIE Photonics West 2018.

21 March 2018
 
J. Alexander Liddle: Metrology at the nanoscale key to understanding of next generation lithography processes

SPIE Newsroom
06 April 2018