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San Jose Convention Center
San Jose, California, United States
24 - 28 February 2019
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SPIE Advanced Lithography, the leading global lithography event

Register for SPIE Advanced Lithography 2019

It's happening next week in San Jose
Hear the latest advancements in optical lithography, metrology, or EUV. This is the meeting where leaders come to solve challenges in lithography, patterning technologies, and materials for the semiconductor industry.

We look forward to seeing everyone in San Jose.

Be prepared

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2019 Plenary presentations, important speakers and the hottest topics

2019 SPIE Advanced Lithography Plenary Speakers

Featured Sponsor, Canon

Important information for speakers

All presenters must upload their presentation to Launchpad before going to their conference room. There will not be an option to use your own device. Learn more

Take a course while you are in San Jose attending SPIE Advanced Lithography


Get the most out of your conference experience by taking a course. Advanced Lithography offers 13 courses taught by recognized experts in industry and academia.

Don't miss the SPIE Advanced Lithography exhibition


See the latest products and meet the industry's top suppliers, integrators, and manufacturers.


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