• Advanced Lithography 2015
    Invitation
    Conferences
    Courses
    Exhibition
    Special Events
    Sponsors
    Travel to San Jose
    Hotels
    Onsite Services
    Registration Pricing + Details
    Proceedings
    For Authors/Presenters
    For Chairs/Committees
    For Exhibitors
San Jose Marriott and San Jose Convention Center
San Jose, California, United States
22 - 26 February 2015
Search Program:  go
Print PageEmail Page

Advance Program Now Available

SPIE Advanced Lithography 2015 40-year Anniversary

SPIE Advanced Lithography, the premier conference for the lithography community. For 40 years, SPIE has brought together industry leaders to solve the latest challenges in lithography and patterning in the semiconductor industry.

Download the 2015 Advance Program View Advance Program (2.63 MB PDF)
Photonics West registration pricing and details View Registration Pricing and Details
View Hotel Information View Hotel Information

Late abstracts may be accepted, subject to chair approval. Contact Pat Wight. If submitting a late abstract, please specify the individual conference.

Register online now Register online
Prices increase after 6 February 2015

A variety of events, all in one week
500 presentationsspecial events * courses * exhibition

2015 Plenary Speakers
 Dr. Xiaowei Shen

Internet-of-Things: Cloud Platform and Industry Solutions
Dr. Xiaowei Shen
Director, IBM Research,
China

 Dr. Tsu-Jae King Liu

Sustaining the Silicon Revolution: From 3D Transistors to 3D Integration
Dr. Tsu-Jae King Lui
Chair of the Dept. of Electrical Engineering and Computer Sciences,
Univ. of California, Berkeley

 Dr. Alan Willner

Activities of the National Photonics Initiative
Dr. Alan Willner
Sample Chaired Professor of Engineering,
Univ. of Sourthern California


Plenaries sponsored by:
2015 Conference Topic Areas
Extreme Ultraviolet (EUV) Lithography
Alternative Lithographic Technologies
Metrology, Inspection, and Process Control for Microlithography
Advances in Patterning Materials and Processes
Optical Microlithography
Design-Process-Technology Co-optimization for Manufacturability
Advanced Etch Technology for Nanopatterning
Subscribe to Updates
The Advanced Lithography Exhibition
Come meet the industry's top semiconductor suppliers, integrators, and manufacturers. For 40 years SPIE Advanced Lithography has been the premier international event that drives the future of lithography research and applications and the exhibition is where you can see the latest products and meet with the leaders in the field.
Learn more on the Exhibition website

SPIE.TV: The latest advances in lithography

Sponsor

SPIE logo

Important Author Dates

Abstract Due Date
Late abstracts may be accepted

Author Notification
24 October 2014

Manuscripts Due
26 January 2015


Conference + Exhibition App

Download your free SPIE Conferences app (for iPhone and Android)

Carry the program on your phone: presentations, exhibitors, maps, courses, special events, local area highlights, people, and more.

Free for iPhone and Android.


Sign Up for Email Updates
Receive email updates on SPIE Advanced Lithography.